EUTEC™ Nano - KPD/KND type filter
Depth-pleated unwoven nanofiber filters
[Features]
EUTEC Nano filters utilize nanometer-order fiber diameter unwoven fibers, achieving high-accuracy filtration down to the sub-micrometer level. By pleating multiple layers of coarsely and finely structured filter materials, KPD/KND type filters combine the advantages of both depth-type and pleated-type filter structures, achieving low pressure drop and long service life.
[Main applications]
- Color-resist filtration
- Sorting of abrasive grains and microparticles (e.g. grinding compounds, CMP (Chemical Mechanical Polishing) slurry, electrode slurry)
- Filtration of high viscosity fluids
[Specifications]
KPD
| Model | 005 | 010 | 020 |
|---|---|---|---|
| Absolute filter rating (μm) | 0.5 | 1.0 | 2.0 |
| Materials (filter element / cartridge) | PP/PP | ||
| Dimensions | 10,20,30inch×70Φ | ||
| Filter area (cm3) | 2100 | 2400 | 2700 |
| Temperature resistance / pressure resistance | 80℃ / 0.49MPa | ||
KND
| Model | 005 | 010 |
|---|---|---|
| Absolute filter rating (μm) | 0.5 | 1.0 |
| Materials (filter element / cartridge) | Nylon 6/PP | |
| Dimensions | 10,20,30inch×70Φ | |
| Filter area (cm3) | 2000 | 2100 |
| Temperature resistance / pressure resistance | 80℃ / 0.49MPa | |
[Performance]
Capture efficiency
Flow rate vs. pressure drop (purified water)
Sorting performance
State of filtrate after filtration of a green photoresist / PGMEA dispersion
with various filter materials
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